±Û·¡½º ³ë±¤¿ë ÆòÇ౤ ³ë±¤±â (200mm x200mm),±Û·¡½º ³ë±¤¿ë ¸¶½ºÅ© ¾ó¶óÀ̳Ê(¹ÝÀÚµ¿Çü)

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´ëÇü ÆòÇ౤ ³ë±¤±â,¸ðµ¨ JSM-2020S, ±Û·¡½º ³ë±¤¿ë ¸¶½ºÅ© ¾ó¶óÀ̳Ê

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ÃÊ°í¾Ð ¼öÀºµî¶Ç´Â LED(365nm,405nm)

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Resolution

8~10 micron

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200MM x200mm »ç°¢ ±Û·¡½º

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228mm x228mm,

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Áø°øÈíÂø °íÁ¤½Ä Glass Mask ,(Çʸ§¸¶½ºÅ©µµ °¡´É)

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ÃÖ´ë 2mm

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 X,Y: ¡¾20 MM, ¹Ìµ¿ 1/8MM 1ȸÀü, Z: 25MM ,¹Ìµ¿ 0.2 MM, ¥è: ¡¾7µµ

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 0~999ÃÊ µðÁöÅÐ ¹æ½Ä

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 ³Ã°¢ÆÒ¿ë ON/OFF Áö¿¬ ŸÀ̸Ó

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200~500¹èÁÜ

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W x D x H/Áß·® :1,400mm*1200mm*1700mm[W*D*H]

AC 220V 50/60 Hz, 11A,250Kg

200mm x 200mm Å©±âÀÇ »ç°¢±Û·¡½º¿ë °íÇØ»óµµ ÆòÇ౤ ³ë±¤±â , Àüµ¿ ¾ó¶óÀÌ´× ±â´É.

¡á Ư¡
-High Efficiency, Uniform Exposure System with 300~450nm
-Uniform, Lightsource System
-Near UV Versions
-Hi-Reliability, Low Maintenance Design

¡á ±Ô°Ý
1 ) Standard Features
- Manual alignment and Exposure system
- Manual Load and Unload
- Manual Alignment Mode
- Beam size :250x250mm
- glass Stage : X,Y,Z and theta Axis
- Tilted wafer stage
- Exposure mode; soft contact, vacuum contact
- UV Power Supply
- cooling unit for lamp
-Double CCD zoom microscope and 20" LCD Monitor
- Oil-less Vacuum Pump

2) System Specification
¨ç Light Source Module
-UV power supply
- Wavelength : NUV
- Intensity : > 8 mw/cm2
- Max. Beam Size : 250x250mm
- Beam Uniformity :less than5 %

¨è DualCCD Microscope Module
-motorized moving stage : X, Y, Z Axis
- Moving Distance
- 400X magnification
- Objective separation : 60 mm
- Y-Axis: 10mm
- Magnification: 400X, WD: 60mm
- 20" LCD Monitor
- Dual optic coaxial illumination

¨é Stage Module
- Stage Moving Distance
- X, Y Axis : 20 mm
- Z Axis : 25 mm
- Theta Axis: 4 degree
- Stage Resolution
- X, Y Stage Resolution: 1§­
- Theta : 0.1 degree
- Z Axis : 10§­
- Align accuracy : <¡¾ 2 um
- tilt stage

¨ê Resolution
- Vacuum Contact : 10 um ( photoresist 1um thickness@Si Wafer )
- Proximaty: 30 um

¨ë Utility
- Dimension(mm) : 1,400mm*1200mm*1400mm[W*D*H]
- Electric Power : 220V,50Amp, 50/60Hz, 1 Phase
- Air : More than 5kg/cm2
- Flow rate 50 Liter/min
- Out side diameter 6 mm Tube
- Vacuum: =600mmHg, ( Vacuum pump included )
- Exhaust: Lamp House Cooling
- Flow rate 10 Liter/min
- Weight : Equipment : 250 kg

¿ëµµ :MEMS ,LithoGraphy..

³³Ç°Ã³ :ÀÎÇÏ´ë, °¡Ãµ´ë, ½Ã¸³´ë, NST,°æ³²´ë,¼øõÇâ´ë ¿Ü ´Ù¼ö¾÷ü

À缺ITS co, Tel:031-479-4211/2

Mail: contrabase26@gmail.com     jsi@jsits.com

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