모델명

대형 평행광 노광기,모델 JSM-2020S

노광원

초고압 수은등또는 LED(365nm,405nm)

노광 방식

단면

Resolution

8~10 micron

노광면적

200MM x200mm 사각 글래스

마스크 사이즈

250mm x250mm,

시료대

진공흡착 고정식 Glass Mask ,(필름마스크도 가능)

시료 두께

최대 2mm

매니퓨레이터 이동범위

 X,Y: ±12 MM, 미동 1/8MM 1회전, Z: 12MM? ,미동 0.2 MM, θ: ±7도

collimate half angle

1.° 이내

노광용타이머

 0~999초 디지털 방식

램프 냉각

 냉각팬용 ON/OFF 지연 타이머

모니터 및 CCD카메라

200~500배줌

베큠펌프

진공 로터리 펌프 포함

치수

W x D x H/중량 :1,400mm*1200mm*1400mm[W*D*H]

AC 220V 50/60 Hz, 11A,250Kg

■ 특징
-High Efficiency, Uniform Exposure System with 300~450nm
-Uniform, Lightsource System
-Near UV Versions
-Hi-Reliability, Low Maintenance Design

■ 규격
1 ) Standard Features
- Manual alignment and Exposure system
- Manual Load and Unload
- Manual Alignment Mode
- Beam size :250x250mm
- glass Stage : X,Y,Z and theta Axis
- Tilted wafer stage
- Exposure mode; soft contact, vacuum contact
- UV Power Supply
- cooling unit for lamp
-Double CCD zoom microscope and 20" LCD Monitor
- Oil-less Vacuum Pump

2) System Specification
① Light Source Module
-UV power supply
- Wavelength : NUV
- Intensity : > 8 mw/cm2
- Max. Beam Size : 250x250mm
- Beam Uniformity :less than5 %

② DualCCD Microscope Module
-motorized moving stage : X, Y, Z Axis
- Moving Distance
- 400X magnification
- Objective separation : 60 mm
- Y-Axis: 10mm
- Magnification: 400X, WD: 60mm
- 20" LCD Monitor
- Dual optic coaxial illumination

③ Stage Module
- Stage Moving Distance
- X, Y Axis : 20 mm
- Z Axis : 25 mm
- Theta Axis: 4 degree
- Stage Resolution
- X, Y Stage Resolution: 1㎛
- Theta : 0.1 degree
- Z Axis : 10㎛
- Align accuracy : <± 2 um
- tilt stage

④ Resolution
- Vacuum Contact : 10 um ( photoresist 1um thickness@Si Wafer )
- Proximaty: 30 um

⑤ Utility
- Dimension(mm) : 1,400mm*1200mm*1400mm[W*D*H]
- Electric Power : 220V,50Amp, 50/60Hz, 1 Phase
- Air : More than 5kg/cm2
- Flow rate 50 Liter/min
- Out side diameter 6 mm Tube
- Vacuum: =600mmHg, ( Vacuum pump included )
- Exhaust: Lamp House Cooling
- Flow rate 10 Liter/min
- Weight : Equipment : 250 kg