스핀코터(Spincoater)

마스크얼라이너(Mask Aligner)

 
Spincoater Home
Spin Processing System
               
Spin Processor   Spin Etcher   Spin Developer  EBR(Edge Bead Removal)  SpinDryer   SpinCoater
               
               
 
Spin Etcher/Developer
     
 

Spin Processor

Spin Etcher

Spin Developer

EBR(Edge Bead Removal)

 

스핀에처/디벨로퍼:
( Spin Etcher for Etching,Developing & Cleaning )
세정(식각), 클리닝, 드라잉     

Fully integrated cabinet for safe and clean etching or developing process

spin-etcher

Spin Etcher JS-84E : 스핀에처

-Manual loading unloading 에칭, 린싱 system
-Full Plastic Housing
- 2 Chemicals Etching , DI-Water Rinsing ,Spin Drying
-Temperature Control for Chemicls (0~50C)
-Max Substrate :최대 200 MM Φ or 125mm x 125mm ,300mm,500mm(선택)
-Speed :1~2,000rpm RPM,
-Fixed dispencing spraying nozzles
-Chemical resistant bowl(PTFE) ,and Bath
-Chemical Flow Rate control by flow meters
-N2 or Clean air Dry Dispensor Nozzle
- 8" Chuck
-4 Dispensing 용 Tubing ,Nozzle( Bath with Heating System :상온 ~50C)
acid, alkali, organic solvent, organic solvent용
-DI-Water Rinsing Line :중앙 공급 라인용
-Nozzle Type : dispensing Type
-Programmable :Unlimited
-automatic chemical dispense, heavy duty motor, including:
- Touchscreen with Customisable Icons ,USB Port
- 1" Drainconnection
-Timer:0-999 seconds
-Tranaparent window
-Programmable Process Control for Speed, Time and step..Valve
- Dimension :1000Wx1500Dx1800H mm

 

 

   
spin-dispenser  

 

 

 

See also our other models:

Cleaning

Etching

 

Spin Process Station
 
Shop » Models » Stations클리닝 & 드라이용 스핀프로세서


 

 

     

Compact integrated solution in single cabinet:

  • Full 플래스틱 하우징 :10mm Thick NPP
  • 이지 프로세스 콘트롤이 가능한 투명 한 뚜껑
  • DI-water and Nitrogen spray Nozzle Located in
  • 개스 누출방지 설계적용
 

 

SpinDryer

SpinCoater

 

 

Coater equipped with:

  • Fully automated dosing pump
  • Dynamic movable dispense arm with constant or Rpm related speed control for maximum uniformity among whole substrate surface
  • Nitrogen dry :optionally available through lid or movable arm
  • Digitally controlled brushless motor with highly accurate speed control and acceleration selectable per recipe step
   

Portable Vacuum Wand

Vacuum Wand Set

Vacuum tips

Vacuum Handles

 
     

 

 

Applications:

  • Drying
  • Rinse/clean
  • Etching
  • Manual coating
  • Automatic coating
  • Developing

 

 

 

     

Mask Pick - Side Grip

Mask Pick - Horizontal Grip

   
     

Manual Reticle SMIF Pod Opener, RSP150

Manual FOUP Opener, 300 mm

   
     

Automatic Wafer Presenter

Manual Five-Wafer Lift Presenter

Manual Single Wafer Presenter

21-manual-wafer-escalators

   
 


재성ITS co.

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 Tel : (031) 479-4211/2, Fax : (0504) 460-0288

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