스핀코터(Spincoater)

마스크얼라이너(Mask Aligner)

 
Spincoater Home
Wafer Handling System
               
TRANSFERS & SORTERS   WAFER ALIGNERS  VACUUM WANDS   WAFER PICKS   METAL CASSETTES   MASK PICKS   OPENERS   PRESENTERS   TRANSPORT BAGS   MOCK WAFERS
               
               
 
Vacuum Wands
     
 

Sorters

SafeGuard Thin/Compound

Automatic Slide Transfer

Manual Slide Transfer

Vacuum Wand Tips
베큠완드 팁

Wafer Size:4"~8",12"

 

     

0-76mm 웨이퍼 핸들링을 위한 정전기 방지 전도성 PEEK 진공 막대 팁. 3° 오프셋의 좁고 짧은 14 x 19mm 진공 포켓이 특징입니다.
표준 진공 포켓(AP1N)으로 제공됩니다.
모든 버전은 각 웨이퍼 처리 용도에 따라 직선(ST), 위로 10° 굽힘(1U), 아래로 10° 굽힘(1D), 위로 30° 굽힘(3U) 또는 아래로 30° 굽힘(3D)으로 제공됩니다. ISO 3 호환.

 

 

Automatic Notch Aligner

Automatic-flat-aligner

Manual-notch-aligner

Manual-flat-aligner

SEMI 스탠다드 웨이퍼 핸들링
Antistatic PEEK Material
Straight or bend
10° BENT DOWN
10° BENT UP
30° BENT DOWN
30° BENT UP
STRAIGHT
 

Portable Wand

Vacuum Wand Set

Vacuum tips

Vacuum Handles

 
   

Portable Wand

Vacuum Wand Set

Vacuum tips

Vacuum Handles

 
     

Wafer 3-point mechanical gripper

Wafer Edge Pick

일반 용도:베큠 완드는 웨이퍼를 한 위치에서 다른 위치로 픽업하고 운반하는 데 사용됩니다(without adding particles)

     

Aluminum Process Cassettes

Aluminum Box Cassettes

Stainless Steel Process Cassettes

Process Cassettes 300mm

분류: 수동 웨이퍼 분류 애플리케이션의 경우 베큠완드를 사용하면 작업자가 상위 로트 내에서 웨이퍼를 안전하고 정확하게
이동할 수 있습니다.
또한 필요에 따라 로트를 결합하고, 테스트 웨이퍼를 추가하고, 손상된 웨이퍼를 교체하는 데에도 사용할 수 있습니다.
     

Mask Pick - Side Grip

Mask Pick - Horizontal Grip

Inspection - 작업자는 베큠완드를 사용하여 상위 로트에서 웨이퍼를 꺼내고 특수 조명 아래에서 검사하여 결함을 찾을 수 있습니다.
이를 통해 프로세스가 성공적으로 이루어졌고 웨이퍼가 필수 사양을 충족하는지 확인됩니다.
     

Manual Reticle SMIF Pod Opener, RSP150

Manual FOUP Opener, 300 mm

Rescue: 베큠완드는 자동화 성능이 저하될 때 카세트, 포드 및 프로세스 도구에서 장애가 발생한 물질(stranded substrates)을 제거하는 데 사용할 수 있습니다.
     

Automatic Wafer Presenter

Manual Five-Wafer Lift Presenter

Manual Single Wafer Presenter

21-manual-wafer-escalators

WHS-V1-AP1N1D
WHS-V1-AP1N1U
WHS-V1-AP1N3D
WHS-V1-AP1N3U
WHS-V1-AP1NST
10° bent down
10° bent up
30° bent down
30° bent up
Straight
WHS-V1-AP3C1D
WHS-V1-AP3C1U
WHS-V1-AP3C3D
WHS-V1-AP3C3U
WHS-V1-AP3CST
10° bent down
10° bent up
30° bent down
30° bent up
Straight, Thin Wafer
WHS-V1-AP4BST
WHS-V1-AP4N1D
WHS-V1-AP4N1U
WHS-V1-AP4N3D
WHS-V1-AP4N3U
Straight
10° bent down
10° bent up
30° bent down
30° bent up
WHS-V1-AP6NST
WHS-V1-AP5NST
WHS-V1-AP5N1D
WHS-V1-AP5N3U
Straight
Straight
10° bent down
30° bent up
WHS-V1-PI1NST
WHS-V1-PI2CST
WHS-V1-PI3NST
WHS-V1-PI4NST
polyimide 50-76 mm nife-edge
polyimide 50-100 mm
Spatula knife-edge for platens/hot plates 150mm
Spatula Knife-Edge for Platens/Hot Plates 200mm

 

       
     
     
     
     
     
베큠완드 팁 분류
품 명
스 펙
납 기
WHS-V1-AP1N1D
PEEK Vacuum Tip, Antistatic, 50-100mm, Bent 10° Down
2-3 weeks
WHS-V1-AP1N1U
PEEK Vacuum Tip, Antistatic, 50-100mm, Bent 10° Up
2-3 weeks
WHS-V1-AP1N3D
PEEK Vacuum Tip, Antistatic, 50-100mm, Bent 30° Down
2-3 weeks
WHS-V1-AP1N3U
PEEK Vacuum Tip, Antistatic, 50-100mm, Bent 30° Up
2-3 weeks
WHS-V1-AP1NST
PEEK Vacuum Tip, Antistatic, 50-100mm, Straight
2 weeks
WHS-V1-AP2C1D
PEEK Vacuum Tip, Antistatic, 50-100mm, Compound/Thin Bent 10° Down
2-3 weeks
WHS-V1-AP2C1U
PEEK Vacuum Tip, Antistatic, 50-100mm, Compound/Thin Bent 10° Up
2-3 weeks
WHS-V1-AP2C3D
PEEK Vacuum Tip, Antistatic, 50-100mm, Compound/Thin Bent 30° Down
2-3 weeks
WHS-V1-AP2C3U
PEEK Vacuum Tip, Antistatic, 50-100mm, Compound/Thin Bent 30° Up
2-3 weeks
WHS-V1-AP2CST
PEEK Vacuum Tip, Antim,static, 50-100mm, Compound/Thin Straight
2 weeks
WHS-V1-AP2N1D
PEEK Vacuum Tip, Antistatic, 76-150mm, Bent 10° Down
2-3 weeks
WHS-V1-AP2N1U
PEEK Vacuum Tip, Antistatic, 76-150mm, Bent 10° Up
2-3 weeks
WHS-V1-AP2N3D
PEEK Vacuum Tip, Antistatic, 76-150mm, Bent 30° Down
2-3 weeks
WHS-V1-AP2N3U
PEEK Vacuum Tip, Antistatic, 76-150mm, Bent 30° Up
2-3 weeks
WHS-V1-AP2NST
PEEK Vacuum Tip, Antistatic, 76-150mm, Straight
2 weeks
WHS-V1-AP2U1D
UHMW Vacuum Tip, 76-150mm, Ultraclean Touchpad, Bent 10° Down
2-3 weeks
WHS-V1-AP2U1U
UHMW Vacuum Tip, 76-150mm, Ultraclean Touchpad, Bent 10° Up
2-3 weeks
WHS-V1-AP2U3D
UHMW Vacuum Tip, 76-150mm, Ultraclean Touchpad, Bent 30° Down
2-3 weeks
WHS-V1-AP2U3U
UHMW Vacuum Tip, 76-150mm, Ultraclean Touchpad, Bent 30° Up
2-3 weeks
WHS-V1-AP2UST
UHMW Vacuum Tip, 76-150mm, Ultraclean Touchpad, Straight
2 weeks
WHS-V1-AP3C1D
PEEK Vacuum Tip, Antistatic, 76-150mm, Compound/Thin Bent 10° Down
2-3 weeks
WHS-V1-AP3C1U
PEEK Vacuum Tip, Antistatic, 76-150mm, Compound/Thin Bent 10° Up
2-3 weeks
WHS-V1-AP3C3D
PEEK Vacuum Tip, Antistatic, 76-150mm, Compound/Thin Bent 30° Down
2-3 weeks
WHS-V1-AP3C3U
PEEK Vacuum Tip, Antistatic, 76-150mm, Compound/Thin Bent 30° Up
2-3 weeks
WHS-V1-AP3CST
PEEK Vacuum Tip, Antistatic, 76-150mm, Compound/Thin Straight
2 weeks
WHS-V1-AP3N1D
PEEK Vacuum Tip, Antistatic, 76-150mm, Bent 10° Down
2-3 weeks
WHS-V1-AP3N1U
PEEK Vacuum Tip, Antistatic, 76-150mm, Bent 10° Up
2-3 weeks
WHS-V1-AP3N3D
PEEK Vacuum Tip, Antistatic, 76-150mm, Bent 30° Down
2-3 weeks
WHS-V1-AP3N3U
PEEK Vacuum Tip, Antistatic, 76-150mm, Bent 30° Up
2-3 weeks
WHS-V1-AP3NST
PEEK Vacuum Tip, Antistatic, 76-150mm, Straight
2 weeks
WHS-V1-AP4BST
PEEK Vacuum Tip, Antistatic, 100-200mm, Straight, Insertion Prevention Bump
2 weeks
WHS-V1-AP4C1D
PEEK Vacuum Tip, Antistatic, 100-200mm, Compound/Thin, Bent 10° Down
2-3 weeks
WHS-V1-AP4C1U
PEEK Vacuum Tip, Antistatic, 100-200mm, Compound/Thin, Bent 10° Up
2-3 weeks
WHS-V1-AP4C3D
PEEK Vacuum Tip, Antistatic, 100-200mm, Compound/Thin, Bent 30° Down
2-3 weeks
WHS-V1-AP4C3U
PEEK Vacuum Tip, Antistatic, 100-200mm, Compound/Thin, Bent 30° Up
2-3 weeks
WHS-V1-AP4CST
PEEK Vacuum Tip, Antistatic, 100-200mm, Compound/Thin, Straight
2 weeks
WHS-V1-AP4N1D
PEEK Vacuum Tip, Antistatic, 100-200mm, Bent 10° Down
2-3 weeks
WHS-V1-AP4N1U
PEEK Vacuum Tip, Antistatic, 100-200mm, Bent 10° Up
2-3 weeks
WHS-V1-AP4N3D
PEEK Vacuum Tip, Antistatic, 100-200mm, Bent 30° Down
2-3 weeks
WHS-V1-AP4N3U
PEEK Vacuum Tip, Antistatic, 100-200mm, Bent 30° Up
2-3 weeks
WHS-V1-AP4NST
PEEK Vacuum Tip, Antistatic, 100-200mm, Straight
2 weeks
WHS-V1-AP4U1D
UHMW Vacuum Tip, 100-200mm, Ultraclean Touchpad, Bent 10° Down
2-3 weeks
WHS-V1-AP4U1U
UHMW Vacuum Tip, 100-200mm, Ultraclean Touchpad, Bent 10° Up
2-3 weeks
WHS-V1-AP4U3D
UHMW Vacuum Tip, 100-200mm, Ultraclean Touchpad, Bent 30° Down
2-3 weeks
WHS-V1-AP4U3U
UHMW Vacuum Tip, 100-200mm, Ultraclean Touchpad, Bent 30° Up
2-3 weeks
WHS-V1-AP4UST
UHMW Vacuum Tip, 100-200mm, Ultraclean Touchpad, Straight
2 weeks
WHS-V1-AP5N1D
PEEK Vacuum Tip, Antistatic, 150-200mm Heavy, Bent 10° Down
2-3 weeks
WHS-V1-AP5N1U
PEEK Vacuum Tip, Antistatic, 150-200mm Heavy, Bent 10° Up
2-3 weeks
WHS-V1-AP5N3D
PEEK Vacuum Tip, Antistatic, 150-200mm Heavy, Bent 30° Down
2-3 weeks
WHS-V1-AP5N3U
PEEK Vacuum Tip, Antistatic, 150-200mm Heavy, Bent 30° Up
2-3 weeks
WHS-V1-AP5NST
PEEK Vacuum Tip, Antistatic, 150-200mm Heavy, Straight
2 weeks
WHS-V1-AP6N1D
PEEK Vacuum Tip, Antistatic, 300mm, Bent 10° Down
2-3 weeks
WHS-V1-AP6N1U
PEEK Vacuum Tip, Antistatic, 300mm, Bent 10° Up
2-3 weeks
WHS-V1-AP6N2D
PEEK Vacuum Tip, Antistatic, 300mm, Bent 20° Down
2-3 weeks
WHS-V1-AP6N2U
PEEK Vacuum Tip, Antistatic, 300mm, Bent 20° Up
2-3 weeks
WHS-V1-AP6N3D
PEEK Vacuum Tip, Antistatic, 300mm, Bent 30° Down
2-3 weeks
WHS-V1-AP6N3U
PEEK Vacuum Tip, Antistatic, 300mm, Bent 30° Up
2-3 weeks
WHS-V1-AP6NST
PEEK Vacuum Tip, Antistatic, 300mm, Straight
2 weeks
WHS-V1-AP6UST
UHMW Vacuum Tip, 300mm, Ultraclean Touchpad, Straight
2 weeks
WHS-V1-PI1NST
Polyimide Vacuum Tip, High Temp, Knife Edge, w/Adapter, 50-76mm
2 weeks
WHS-V1-PI2CST
Polyimide Vacuum Tip, High Temp, Knife Edge, w/Adapter, 50-100mm, Compound
2 weeks
WHS-V1-PI2NST
Polyimide Vacuum Tip, High Temp, Knife Edge, w/Adapter, 50-100mm
2 weeks
WHS-V1-PI3CST
Polyimide Vacuum Tip, High Temp, Knife Edge, w/Adapter, 150mm, Compound
2 weeks
WHS-V1-PI3NST
Polyimide Vacuum Tip, High Temp, Knife Edge, w/Adapter, 150mm
2 weeks
WHS-V1-PI4NST
Polyimide Vacuum Tip, High Temp, Knife Edge, w/Adapter, 200mm
2 weeks
     
     
 


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