스핀프로세스 스테이션:
( Spin Process Station for Etching & Cleaning ) 세정(식각), 클리닝, 드라잉

Fully integrated cabinet for safe and clean etching or developing process

spin processor

Spin process Station JS-84EDR : 8인치 스핀프로세스 스테이션

-Manual loading unloading Dispensing Drying system
-Full Plastic Housing
- 4 Chemicals Etching , DI-Water Rinsing ,Spin Drying
-Temperature Control for Chemicls (0~70C)
-Max Substrate :최대 200 MM ,300mm,500mm(선택)
-Speed :1~2,000rpm RPM,
-Fixed dispencing spraying nozzles
-Chemical resistant bowl(PTFE) ,and Bath
-Chemical Flow Rate control by flow meters
-N2 or Clean air Dry Dispensor Nozzle
- 8" Chuck , 3cm x 3cm Chuck
-4 Dispensing 용 Tubing ,Nozzle( Bath with Heating System :상온 ~70C)
acid, alkali, organic solvent, organic solvent용
-DI-Water Rinsing Line :중앙 공급 라인용
-Nozzle Type : dispensing Type
-Programmable :Unlimited
-automatic chemical dispense, heavy duty motor, including:
- Touchscreen with Customisable Icons ,USB Port
- 1" Drainconnection
-Timer:0-999 seconds
-Tranaparent window
-Programmable Process Control for Speed, Time and step..Valve
- Dimension :1600Wx1000Dx1800H mm

Fully integrated cabinet with double spin chambers for safe and clean coating & developing process

Coater equipped with:

Fully automated dosing pump
Dynamic movable dispense arm with constant or Rpm related speed control for maximum uniformity among whole substrate surface
Front and back side adjustable Edge Bead Removal
Nitrogen dry :optionally available through lid or movable arm
Digitally controlled brushless motor with highly accurate speed control and acceleration selectable per recipe step

Developer equipped with:

Fully automated top spray developing system with double contained lines
HD drive suitable for chemical saver “puddle” developing
Developer dispensed through dispense vessel
Substrate Front & Back Side In Situ Di Water Rinse with manually adjustable flow rate
Combined chamber rinse and purge system for safe access to process chamber
Selectable drain line with integrated drain canister for waste collecting

See also our other models:

Cleaning

Etching

크리닝 & 드라이용 스핀프로세서

스핀프로세스 스테이션: ( Spin Process Station for Etching & Cleaning ) 세정(식각), 클리닝, 드라잉

스핀프로세스 스테이션:
( Spin Process Station for Etching & Cleaning ) 세정(식각), 클리닝, 드라잉