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ALD Systems Comparison
Compare ALD equipment and systems manufacturedAnric Technologies. Compare by size and capability.
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AT200M |
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AT410M/610/810 |
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AT650T |
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AT650P |
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Desktop (W: ~11” (27.9cm) x D: 15” (38.1cm) x H: 14.5” (36.8cm)) |
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Desktop (W: 24.5” (62.3cm) x D: 24” (61cm) x H: 15.75” (40.5cm))[610 D: 25″ (63.5cm)] |
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Desktop (W: 15” (38.1cm) x D: 15” (38.1cm) x H: Less that 38” (96.5cm)) |
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Desktop (W: 15” (38.1cm) x D: 15” (38.1cm) x H: 38” (96.5cm)) |
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Sample Size = 2 inch (x2) up to 2 x 2 x 2” volume |
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410 = 4 inch; 610 = 6 inch; 810 = 8 inch |
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6 inch |
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6 inch |
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Thermal to 300°C |
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Thermal to 320°C |
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Thermal to 400°C
(upgradeable to Plasma) |
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Plasma and Thermal to
400°C |
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One Precursor/One Counter
Reactant |
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Three Precursors/ Up to Three Counter
Reactants |
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Four Precursors/Four
Counter Reactants |
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Four Precursors/Four
Counter Reactants |
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Heated Precursor to 150°C |
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Heated Precursor to 180°C (N2 Assist Available) |
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3 Precursors to 185°C (with optional pressure boost) , 1 at RT |
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3 Precursors to 185°C (with optional pressure boost) , 1 at RT |
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All stainless steel chamber and metal sealed stainless lines |
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All aluminum chamber (hot walled) and metal sealed stainless lines |
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All aluminum chamber (warm walled) and metal sealed stainless lines and chuck |
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All aluminum chamber (warm walled) and metal sealed stainless lines and chuck |
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Heated lines and fast pulsing ALD valves |
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Heated lines and fast pulsing ALD valves |
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Heated lines and fast pulsing ALD valves |
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Heated lines and fast pulsing ALD valves |
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Ultrafast MFC |
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Ultrafast MFC |
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Up to four ultrafast MFCs |
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Up to four ultrafast MFCs |
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5” Display w. Integrated
PLC |
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7“ Display with integrated
PLC |
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10“ Display with integrated
PLC |
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10“ Display with integrated
PLC |
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