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APT 스핀코터용 핫플레이트(Hotplate)      

HP200AD / HP350AD

업그레이더블 옵션
손쉬운 플레이트(척)교환
R&D와 Pilot Line용으로 적합

싱글용 또는 더블용 가능
듀얼 프로세싱이 가능한 히팅지역 (Several heater surface)
정확한 디지털 온도제어 1°C.
정밀한 온도제어가 필요한 PR의소프트베이크나 하드베이크 큐어링용으로 적합

사양:

  • Low surface temperature: gradient heating unit (safe housing temp);
  • Diagnostic serial interface (RS232);
  • Precision temperature controlling system: uniform temp.: +/- 0,5°C;
  • Digital temperature controller: adjustable in steps of 1°C;
  • Countdown timer (1-999 sec.) with acoustic alert.

Hot Plate with cover

-Polos Precision Bake Plate
-¿Âµµ¹üÀ§:50-230C
-20°³°ª ÀúÀå °¡´É :temp/time
-ŸÀ̸Ó:1-999sec with accoustic
-Temperature Unioformity :+_1C
-plate »çÀÌÁî: 220 x 220 mm -Suitable for 1 x 200 mm wafer
-Power Max :1200w220 vac
-È÷ÆÃÆÇ :Aluminium (anodised)
-Housing Material : Stainless Steel
-Ä¡¼ö:450 x 320 x135 mm
-¶Ñ²± :stainless steel
-The POLOS Hotplate is available for processing single
-It is suitable for soft bake as well as hard bake processes,
and curing of photo resist or epoxy or any other work requiring precise temperature control.
-Standard models for substrate sizes 200mm

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ALD System(Atomic Layer Deposition)

espro Flowmeter

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Tel:031-479-4211/2
Mail: contrabase26@gmail.com     jsi@jsits.com
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