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Spin coater JSI£­402T(Å×Ç÷Р½ºÇÉÄÚÅÍ,teflon spincoater)

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JSI£­402T

JSI£­603T

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¥õ10¡­100mm dia ÀÌÇÏ

10-150mm dia ÀÌÇÏ

(100 gÀÌÇÏ)

ÄÅ Áö¸§ ÀçÁú

¥õ200 mm¡¤Å×Ç÷к¸¿ï

¥õ250 mm¡¤Å×Ç÷к¸¿ï

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SS,Å×Ç÷к¸¿ï

SS,Å×Ç÷к¸¿ï

300W*300D*270Hmm

350W*450D*270Hmm

½ºÇÉ ¸ðÅÍ

½ºÇǵå ÄÜÆ®·Ñ ¸ðÅÍ

same

ȸÀü¼ö

250¡­5000rpm

250¡­6000rpm

ȸÀü Ç¥½Ã

µðÁöÅÐ µð½ºÇ÷¹ÀÌ

same

(Àü¾Ð Ç¥½Ã ´ëÀÀ)

ȸÀüSTEP

2´Ü

3´Ü

1 sec¡­999sec

same

Àü¿ø

AC220V

same

Áø°ø

200 Torr ÀÌ»ó

same

ÅäÃâ ³ëÁñ

1 °èÅë ¼öµ¿ ½ºÀ®½Ä

¿É¼Ç

ô±âº» 1°³

ô±âº» 1°³

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                                          °æ±âµµ ¾È¾ç½Ã µ¿¾È±¸ È£°è 555-9
                                           ¾È¾ç ±¹Á¦ À¯Åë´ÜÁö 17µ¿ 127È£
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