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Mask Aligner & Exposure Unit                                                        Home

 

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 UV lightsource system (Fine Resolution¿ë UV ³ë±¤±â)
 :10 micron±Þ ¹Ì¼¼ÆÐÅÏ Á¦ÀÛ¿ë
    

Model JPUV-200, JPUV-300

 

                        
±¸¼º : Parallel UV-light ¼Ò½º ,¸¶½ºÅ©È¦´õ, UV source controller

 * º» UV Ecposure unit´Â ¹Ì¼¼ÆÐÅÏ¿ë(10 micron Resolution) ³ë±¤±â ·Î¼­ ¹ÝµµÃ¼ °øÁ¤À̳ª Fine Resolution PCB Á¦ÀÛ¿ëÀÔ´Ï´Ù,

Spec & Detail

 

JPUV-200

JPUV-300

Effective exposure area

205x205 mm

305x305 mm

Exposure type

Single side Exposure

Exposure Time control
Light integrator Method
Light source

3Kw ÃÊ°í¾Ð¼öÀºµî

Optical mirror type

flat-mirror Type

Lamp life time

1100 hr

U.V. intensity

15§Ñ/§²

12§Ñ/§²

Uniformity

92%

Resolution

10~um

Wave length

365~405 nm

Half angle coliimasion

less than 1.5¢ª

Declination angle

less than 1.5¢ª

UV exposing type

light integrating system

Cooling type

air cooling

Mask Holder

Vacuum Or Mechanical Type

Alignment
Not Included (Optional)
     
Dimension,wxdxh mm
550x1050x1550
750x1550x2050

 

 

 

 

 

 

 

Mask Aligner(¸¶½ºÅ©¾ó¶óÀ̳Ê,ÆòÇ౤ ³ë±¤±â)

  

 

Mask Aligner(¸¶½ºÅ©¾ó¶óÀ̳Ê),ÆòÇ౤ ³ë±¤±â,¸ðµ¨ JSM-4S

*³ë±¤¿ø :ÃÊ°í¾Ð ¼öÀºµî¶Ç´Â LED(365nm,405nm),
*´Ü¸é ³ë±¤
*Resolution : 1micron
*³ë±¤ ¸éÀû : ©ª 100mm ,dia. 125mm ,dia. 200mm?
*¸¶½ºÅ©»çÀÌÁî: ÃÖ´ë 5ÀÎÄ¡ 125mm x125mm, 6ÀÎÄ¡ 150mmx 150mm,9ÀÎÄ¡(235mmx 235mm)
*½Ã·á´ë:Áø°øÈíÂø °íÁ¤½Ä Glass Mask (Çʸ§¸¶½ºÅ©µµ °¡´É)
*½Ã·á µÎ²²:ÃÖ´ë 2MM

*¸Å´ÏÇ»·¹ÀÌÅÍ À̵¿¹üÀ§:
  X,Y: ¡¾12 MM, ¹Ìµ¿ 1/8MM 1ȸÀü, Z: 12MM? ,¹Ìµ¿ 0.2 MM, ¥è: ¡¾7µµ
* collimate half angle 1.¡Æ À̳»
*Çö¹Ì°æ,·¥ÇÁÇϿ콺 : °³º° ȸÀü À̵¿ ½Ä(¼öµ¿)
*³ë±¤¿ë ŸÀ̸Ó: 0~999ÃÊ µðÁöÅÐ ¹æ½Ä
*·¥ÇÁ ³Ã°¢ ÆÒ¿ë ON/OFF Áö¿¬ ŸÀÌ¸Ó :
*Ä¡¼ö :WxDxH/Áß·® : 850X650X900mm, ¾à 80 Kg,
*AC 220V 50/60 Hz, 11A
*Çö¹Ì°æ ¡ÚÇö¹Ì°æ: 200~500¹èÁÜ
*¸ð´ÏÅÍ ¹× CCDÄ«¸Þ¶ó
*Áø°ø ·ÎÅ͸® ÆßÇÁ Æ÷ÇÔ

 

 

À缺ITS(031-479-4211/2)Àº
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