USB

POLOS 싱글 웨이퍼 스핀코터 Spincoater Main

미래형 고성능 스핀코터?
스핀코터

고성능 , 다기능, 고정밀, 고신뢰성 스핀코터.

 

모든작업 을 콘트롤 가능한 터치스크린 패널

manufactured in Germany.

Clear view of your process

Polos 스핀커터는 R&D 용으로 특별히 설계된 스핀코터 입니다.

4" 프로그램용 디스플레이에서 여러작업을 콘트롤 가능합니다. MEMS, Semi-may require mask cleaning, or a coating step conductor, PV, Microfluidics field, 등등

POLOS 싱글 웨이퍼 스핀코터는수많은 응용작업이 가능합니다.

cleaning, rinse/dry, coating, developing and etching.

4인치 터치스크린 콘트롤 디스플레이

USB 소켓 장착

unlimited메모리 및 스텝 기능

독일제 디지털 서보모터 장착으로 최고의 정밀도 및 신뢰성 요하는 작업 가능.

α-crystalline NPP-H 사용으로 일반 NPP보다 100C에서 2배이상의 강도 및 내구성 ,내충격성보유.

스핀코터 특징:

고속 가속 기능 :up to 0 - 12,000rpm in 0.3 sec. between speed and acceleration Without line break

최대 가속도 :30,000rpm/sec

분리 가능한 터치스크린 콘트롤 패널 - 글로브박스 (glove box)내 설치시 유리.

회전 및 역회전 기능:“puddle” develop and/or etch.

Full-Engineering Plastics only, high quality seamless fabrication.

세이프티 록 장착.

N2 퍼지포트 장착 :Syringe Holder & Diffuser for N2

외부 관찰 가능한 강화 Glass cover장착 :

 

depending on substrate size and chuck type

 

 

Benefits

Where the application requires PTFE, we use TFM1600 material, superior for use with chemicals above standard PTFE, with a much higher material surface density than standard PTFE,

thus significantly lower “Memory Capability” for absorbing contamination from Chemicals.

Liners are available in PET (Polyethylenterephthalat), 0.5mm thick, transparent, antistatic (108 - 1010 Ω) to prevent possible build-up of static charge in the chamber.

 

SPIN150i - SPIN200i 스핀코터

Specifications SPIN150i SPIN200i
프로그램수:
스텝:
회전수:
정밀도:
회전방향:
Unlimited
Unlimited
0-12,000 rpm +/-1rpm steps
± 0.1 rpm
정회전,역회전 , Puddle
Unlimited
Unlimited
0-12,000 rpm +/-1rpm steps
± 0.1 rpm
정회전,역회전 , Puddle
최대 가속도:Ramp up down가능
시간 설정
30,000 rpm/sec
Unlimited , ± 0.1 seconds steps
30,000 rpm/sec
Unlimited, ± 0.1 seconds steps
Free programmable outputs:
3 pcs, relays, nominal switching
capacity 0.5A /125 VAC - 0.3A / 60DC
3 pcs, relays, nominal switching
capacity 0,5 A /125 VAC - 0.3A / 60VDC
시스템 본체 재질:
챔버 재질l:
Natural Polypropylene (NPP)
Natural Polypropylene (NPP) or High Chemical Resistant PTFE (TFM)
Natural Polypropylene (NPP)
Natural Polypropylene (NPP) or High Chemical Resistant PTFE (TFM)
Interface: External connection:
Detachable, full-size touchscreen, glove-friendly, IP52, chemical resistant 1 USB Port in the controller
Detachable, full-size touchscreen, glove-friendly, IP52, chemical resistant 1 USB Port in the controller
최대시료 사이즈 :
Max. process chamber diameter:
160mm round or 4인치 x 4인치 square
260 mm round or 6인치 x 6인치 square
Dimension (desktop version):
Shipping weight:
Shipping dimension:
Requirements Voltage:
Power consumption:

Max. current: Vacuum:
Motor purge gas:
Drain connection:
202 mm 274 (w) x 250 (h) x 451 (d) mm
14 kgs
600 x 380 x 360 mm
100 - 120 VAC / 200 - 240 VAC
50/60 Hz (auto select) Max. 500 W 5A / 2,5A

-65 kPa (-19 inchHg), > 80 lpm
Tube OD Ø8mm 20 - 50 kPa, 2-5 l/min, Tube OD Ø 6mm
1” M-NPT
302 mm 380 (w) x 307 (h) x 559 (d) mm
20 kgs
680 x 580 x 480 mm
100 - 120 VAC / 200 - 240 VAC
50/60 Hz (auto select) Max. 500 W 5A / 2,5A

-65 kPa (-19 inchHg), > 80 lpm
Tube OD Ø8mm 20 - 50 kPa, 2-5 l/min, Tube OD Ø 6mm
1” M-NPT

 

 

Measured without substrate, limitations may apply depending on chuck used and substrate specification

For our spin processors and chucks we use NPP-H with α-crystalline properties..


Options SPIN150i/SPIN200i 스핀코터

 

 

POLOS Advanced 200 - 300 - 450 스핀코터

300mm

Polos Advanced series는 디스펜싱 장치를 추가 하는데 좀더 편리합니다.

Automatic Sequential or Parallel Chemical
Dispense Up to 6 spray nozzles Each programmable independently
Dispense Vessel (DV), DI Water or N2

 

 

Specifications POLOS Advanced 스핀코터

Specifications POLOS 200 Advanced 스핀코터 POLOS 300 Advanced 스핀코터
프로그램수:
스텝:
회전수:
정밀도:
회전방향:
최대 가속도:Ramp up down가능
시간 설정
Unlimited
Unlimited
1 - 12,000 rpm ± 1rpm steps
± 0.1 rpm
Clockwise, Counter clockwise and Puddle
30,000 rpm/sec
unlimited
Unlimited
Unlimited
1 - 12,000 rpm ± 1rpm steps
± 0.1 rpm
Clockwise, Counter clockwise and Puddle
30,000 rpm/sec
unlimited

Free programmable outputs:
3 dry relays as standard
Up to 16 digital input, 16 digital
output, 4 analog input, 4 analog output (with optional IO modules)
3 dry relays as standard
Up to 16 digital input, 16 digital
output, 4 analog input, 4 analog output (with optional IO modules)
시스템 본체 재질:
챔버 재질l:
Natural Polypropylene (NPP)
Natural Polypropylene (NPP) or High Chemical Resistant PTFE (TFM)
Natural Polypropylene (NPP)
Natural Polypropylene (NPP) or High Chemical Resistant PTFE (TFM)
Interface: External connection:
Detachable, full-size touchscreen, glove-friendly, IP52, chemical resistant 1 USB Port in the controller
Detachable, full-size touchscreen, glove-friendly, IP52, chemical resistant 1 USB Port in the controller
최대시료 사이즈 :
Max. process chamber diameter:
260mm round or 6인치 x 6인치 square
360mm round or 8인치 x 8인치 square
Dimension (desktop version):
302 mm 380 (w) x 307 (h) x 599 (d) mm
402 mm 430 (w) x 310 (h) x 650 (d) mm
Shipping weight:
Shipping dimension:
20 kgs
680 x 580 x 480 mm

32 kgs
780 (w) x 620 (h) x 580 (d) mm
Requirements Voltage:
Power consumption:
Max. current: Vacuum:
Motor purge gas:
Drain connection:

100 - 120 VAC / 200 - 240 VAC
50/60 Hz (auto select) Peak 1800 W 10A / 8A
-80 kPa (-24 inchHg), > 80 lpm
Tube OD Ø8mm 20 - 50 kPa, 2-5 l/min, Tube OD Ø 6mm
1” M-NPT

100 - 120 VAC / 200 - 240 VAC
50/60 Hz (auto select) Peak 1800 W 10A / 8A
-80 kPa (-24 inchHg), > 80 lpm
Tube OD Ø8mm 20 - 50 kPa, 2-5 l/min, Tube OD Ø 6mm
1” M-NPT

     

 

Specifications POLOS 450 Advanced 스핀코터
프로그램수:
스텝:
회전수:
정밀도:
회전방향:
최대 가속도:Ramp up down가능
시간 설정
Free programmable outputs:



시스템 본체 재질:
챔버 재질l:



Interface: External connection:

최대시료 사이즈 :
Max. process chamber diameter:

Dimension (desktop version):
Shipping weight:
Shipping dimension:
Requirements Voltage:
Power consumption:

Max. current: Vacuum:
Motor purge gas:
Drain connection:
Unlimited
Unlimited
0-1,500 rpm ± 1rpm steps
± 0.1 rpm
Clockwise, Counter clockwise and Puddle
<1500 rpm/s depends on the load
unlimited
3 dry relays, nominal switching capacity
0.5A /125 VAC - 0.3A / 60DC


Natural Polypropylene (NPP)
Natural Polypropylene (NPP) or High Chemical Resistant PTFE (TFM) Detachable, full-size touchscreen, glove-friendly, IP52, chemical resistant


1 USB Port in the controller

460 round and 350x350mm square substrates
502 mm

795 (w) x 638 (h) x 922 (d) mm
75 kgs
800 x 790 x 1180 mm
200 - 240 VAC 50/60 Hz
Peak 1000W 10A

-80 kPa (-24 inchHg), > 80 lpm.
Tube OD Ø 8mm 20 - 50 kPa. Tube OD Ø 6mm 500lph
1,5” M-NPT
   

 

Considering additional capability of standard unit such as USB backup, recipe cycling, PC software etc.

Measured without substrate, limitations may apply depending on chuck used and substrate specification.

POLOS 200/300/450 Advanced 스핀코터 옵셔널 악세사리

EBR (Edge Bead Removal)

Auto Dispense Lines Full PTFE Dispense Vessel Automated injector line

MegPie BSR (Back Side Rinse)

The Sapphire MegPie is a single-wafer Megasonic transducer for cleaning and sonochemical processing.

 

Static Barrier Plate High Pressure Jet

Corrugated Drainhose, Drain tank andVacuum Pump connector In NPP, including connection to

The vacuum pump is very quite and reliable.connect to the drainport.

   

 

 

 

POLOS 600 - 1000 :대형 스핀코터

POLOS 1000 NPP POLOS 600 NPP

최대시료 사이즈 :1000mm dia

 최대시료사이즈 :642 mm dia

unloading of 430x430mm substrate
   

 

 

 

스핀코터용 척(Vacuum or Mechanical Chuck)

- PP or PTFE (solvent safe) chucks공급 가능 최대 300mm.
better film uniformity during coating.

Chucks are available in following materials: PP, PTFE

 

. 척제작은 상담요망

재성ITS co.      Tel:031-479-4211/2   Fax:031-479-4213
jsi@jsits.com
안양시 동안구 호계동 555-9 국제유통상가,17동 127호