ÈÞ´ë¿ë ¹Ú¸·ÃøÁ¤½Ã½ºÅÛ FR-pOrtable      Spincoater Main

ÈÞ´ë¿ë ¹Ú¸·ÃøÁ¤ ½Ã½ºÅÛ

FR-pOrtable ´Â Åõ¸í¶Ç´Â ¹ÝÅõ¸íÀÇ Çʸ§ ,Çʸ§¹¶Ä¡ÀÇ ±¤ÇÐÀûƯ¼ºÀ» ÃøÁ¤Çϴµ¥ À¯¿ëÇÑ À¯´ÏÅ© ÅäÅ» ½Ã½ºÅÛÀÔ´Ï´Ù.

FR-pOrtable À» °¡Áö°í 350-1,000nm ½ºÆåÆ®·³¹üÀ§³»¿¡¼­ ¹Ý»çÀ²(reflectance)ÃøÁ¤ÀÌ °¡´ÉÇÕ´Ï´Ù.

Çѹø¸¸ÀÇ Å¬¸¯À¸·Î ºûÀÇ ¹Ý»çÀ²À» ÃøÁ¤ÇÔÀ¸·Î½á ¾ã°í µÎ²¨¿î Åõ¸í ¹ÝÅõ¸íÀÇ Çʸ§ÀÇ Æ¯¼ºÀ» ÆľÇÇÒ¼ö ÀÖ½À´Ï´Ù.

ÀûÀº¸éÀûÀ¸·Îµµ ¼³Ä¡ °¡´ÉÇϸç. FR-pOrtable Àº ³ëÆ®ºÏÀÇ USB¿¡ ¿¬°áÇÏ´ÂÁ¤µµÀÇ Àü·ÂÀ¸·Îµµ ÀÛµ¿ °¡´ÉÇÒÁ¤µµ·Î Æí¸®¼ºÀÌ ¶Ù¾î³³´Ï´Ù.

Equipped with:

A) Hybrid integrated Incandescent-LED ±¤¿ø¼Ò½º´Â 350-2000nm ¹üÀ§ÀÇ ºûÀ» ¹æÃâÇϸç.
embedded ymcontroller¸¦ ÅëÇؼ­ ¼ÒÇÁÆ®¿þ¾î·Î ÄÁÆ®·ÑµË´Ï´Ù.
-±¤¿øÀÇ Æò±Õ¼ö¸í:20000h.
-Miniaturized Spectrometer in the 360nm - 1050nm spectral range, with 3648 pixel resolution and 16bit A/D resolution.
-Àü¿ø¿¬°á: USB
-ÆÄ¿ö: The system (both spectrometer and light source):usb Æ÷Æ® ¿¬°áÅëÇÑ ÀÛµ¿


B) FR-Monitor software·Î´Â ÀåºñÀÇ ÀÛµ¿¹× µ¥ÀÌÅͼöÁý¹× µ¥ÀÌÅͺм®À» ÅëÇÏ¿© ´ÙÀ½ÀÇ Ç׸ñ ÃøÁ¤ÀÌ °¡´ÉÇÕ´Ï´Ù.
1) ÇÑÀå ¶Ç´Â ¿©·¯ÀåÀÇ Çʸ§ µÎ²² ÃøÁ¤
2) ³¹Àå Çʸ§ÀÇ ±¼ÀýÀ²(refractive index)ÃøÁ¤ (at static or dynamic modes).
¼ÒÇÁÆ®¿þ¾î¿¡´Â ¿©·¯ ¹°ÁúÀÇ µ¥ÀÌÅͺ£À̽º°¡ Æ÷ÇԵǾî ÃßÈÄ »ç¿ëÀÚ°¡ È°¿ë¹üÀ§¸¦ ³ÐÈú¼ö ÀÖ°Ô ÇØÁÖ¸ç
¿Â¶óÀΰú ¿ÀÇÁ¶óÀÎ ÃøÁ¤À» °¡´ÉÇÏ°Ô ÇØÁÝ´Ï´Ù.?

FR-Monitor ´Â Èí±¤(absorbance), Åõ°úÀ²(transmittance)¿Í ¹Ý»çÀ²(reflectance)ÃøÁ¤À»
°¡´ÉÇÏ°Ô ÇÕ´Ï´Ù.

¶ÇÇÑ ¸ðµçÇʸ§¹¶Ä¡(film stack)¿¡ ´ëÇÑ ÀÌ·ÐÀûÀÎ ¹Ý»çÀ² ½ºÆåÆ®·³(reflectance spectrum)À» Á¦°øÇÕ´Ï´Ù.

**One license for use with FR-tool and unlimited licenses for installation in other computers
to be used for post processing of the results.

C) ·¹ÆÛ·±½º »ùÇÃ:
a) a silicon calibrated reflectance standard,
b) a characterized area of SiO2/Si and
c) a characterized area of Si3N4/SiO2/Si.

D) ¹Ý»çÀ² ÇÁ·Îºê ½ºÅ×ÀÌÁö and Ȧ´õ (Çʸ§ÀÇ ¹Ý»çÀ²ÃøÁ¤¿ë):
-ÃÖ´ë½Ã·á »çÀÌÁî: 180mm, irregular shape.
-Manual adjustment of measurement height up to60mm.

E) ¹Ý»çÀ² ÃøÁ¤¿ë Optical probe. Transmitting light fibers :6x200ym,
reflectance fiber 1x200ym,

embedded in the tool

The overall specifications of the quoted system are:
- The system is able to measure thickness of single & multi, transparent &
semi-transparent supported & free-standing, uniform & non-uniform films with thickness
in the 20nm - 90ym range.

°¡´É ½Ã·á»çÀÌÁî: 1mmX1mm to 180mmX180mm.

- Çʸ§µÎ²²´Â 0.1nm Á¤¹Ðµµ·Î ÃøÁ¤ °¡´É, accuracy better than 1nm.
-½Ã½ºÅÛÀº ½Ç½Ã°£ ÃøÁ¤¹× ºÐ¼® spectra sequencesÀÇ ÈÄó¸® ¹×¿µ»óÁغñ°¡ °¡´ÉÇÕ´Ï´Ù,

- ½Ã½ºÅÛÀº Åõ¸é ¶Ç´Â ¹ÝÅõ¸íÇÑ Çʸ§µéÀÇ ±¼ÀýÀ²(±¼Àý·ü)À» ÃøÁ¤ÇÒ¼ö ÀÖ½À´Ï´Ù.
- Çʸ§ÀÇ µÎ²²¿Í ¹«°üÇÏ°Ô Åõ¸í ¶Ç´Â ¹ÝÅõ¸í Çʸ§µéÀÇ ±¼ÀýÀ²(Real and imaginary part)À»
ÃøÁ¤°¡´ÉÇÕ´Ï´Ù.
(Real and imaginary parts of the refractive index are calculated for transparent and semi-
transparent films independently of the film thickness.)

- FR-Monitor ´Â ´Ù¾çÇÑ ¹°Áú¿¡ ´ëÇÑ ±¤¹üÀ§ÇÑ µ¥ÀÌÅÍ º£À̸¦ Æ÷ÇÔÇÏ°í ÀÖ½À´Ï´Ù.(dielectrics,
resists, polymers, semiconductors:6°³¿ù ¸¶´Ù ¾÷±×·¹À̵åµÊ).
- FR-Monitor ´Â 3³â°£ 1³â¿¡ 2¹ø¾¿ ¹«·á·Î?¾÷±×·¹ÀÌµå µË´Ï´Ù..





FR-pOrtableÄ«Å»·Î±×


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