스핀프로세스 스테이션:코팅 및 현상용 ( Spin Process Station for Coating & Developing)
Fully integrated cabinet with double spin chambers for safe and clean coating & developing process
Compact integrated solution in single cabinet:
- Full 플래스틱 하우징 : 20mm Thick NPP (NPP)
- 이지 프로세스 콘트롤이 가능한 투명 한 뚜껑
- DI-water and Nitrogen spray guns Located in handy position to facilitate cleaning of the chamber
- 안전센서장착 :liquid leakage and choked drain detection
- Exhaust/presence 모니터링 시스템
Coater equipped with:
- Fully automated dosing pump
- Dynamic movable dispense arm with constant or Rpm related speed control for maximum uniformity among whole substrate surface
- Front and back side adjustable Edge Bead Removal
- Nitrogen dry :optionally available through lid or movable arm
- Digitally controlled brushless motor with highly accurate speed control and acceleration selectable per recipe step
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Developer equipped with:
- Fully automated top spray developing system with double contained lines
- HD drive suitable for chemical saver “puddle” developing
- Developer dispensed through dispense vessel
- Substrate Front & Back Side In Situ Di Water Rinse with manually adjustable flow rate
- Combined chamber rinse and purge system for safe access to process chamber
- Selectable drain line with integrated drain canister for waste collecting
See also our other models:
크리닝 & 드라이용 스핀프로세서