척:SPIN150, MCD200 up to ACD300 용        Spincoater Main

Round Substrates 
2" up to 300mm wafers
베큠척,
without centering pins.

A-V36-S45-PP
베큠척 Ø45mm (1,75"), up to 6"

A-V87-S96-PP
베큠척 Ø96mm (3,75"), 8"

A-V129-S150-PP
베큠척 Ø150mm, for 300mm

Round Substrates
2" up to 300mm wafers
베큠척,
with centering pins.
Customized sizes at request.

B-V87-CP6-S200-PP
베큠척 Ø96mm (3,75"), 6 centering pins, 8" size.
(Please specify substrate size in mm.)

B-V36-CP4-S75-PP
베큠척 Ø45mm (1,75"), 4 centering pins, 3 size.
(Please specify substrate size in mm.)

B-V36-CP4-S100-PP
베큠척 Ø45mm (1,75"), 4 centering pins, 4" size.
(Please specify substrate size in mm.)

B-V36-CP4-S150-PP
베큠척 Ø45mm (1,75"), 4 centering pins, 6" size.
(Please specify substrate size in mm.)

Round Substrates
2" up to 300mm wafers
Non-베큠척,
with centering pins.
Customized sizes at request.

C-CP4-S50-S75-PP
메커니컬 타입(without vacuum); 4 centering pins, 2" and 3" size.
(Please specify substrate size in mm.)

C-CP4-S50-S75-S100-PP
메커니컬 타입(without vacuum); 4 centering pins, 2", 3", 4" size.
(Please specify substrate size in mm.)

C-CP6-S150-PP
메커니컬 타입(without vacuum); 6 centering pins, 6"size.
(Please specify substrate size in mm.)

C-CP6-S200-PP
메커니컬 타입(without vacuum); 6 centering pins, 8" size.
(Please specify substrate size in mm.)

C-CP4-S50-S75-PP
메커니컬 타입(without vacuum); 4 centering pins, 2" and 3" size.
(Please specify substrate size in mm.)

Fragments/Die.

D-V10-S50-PP
Fragment Adaptor, Vacuum 50mm centerhole
for use with A-V36-S45-PP 베큠척

D-V2.5-S6-PP
Fragment Adaptor, Vacuum 6mm centerhole
for use with A-V36-S45-PP 베큠척

Square Substrates
(Masks, Solar Cells, etc.)
Non-vacuum Chuck with centering pins.
Customized sizes at request.

E-CP6-S101.6-PP
with 6 centering pins,
메커니컬 타입(without vacuum) for 101.6mm (4") square substrates.
(Please specify substrate size in mm.)

E-CP6-S127-PP
with 6 centering pins,
메커니컬 타입(without vacuum) for 127mm (5") square substrates.
(Please specify substrate size in mm.)

E-CP6-S152.4-PP
with 6 centering pins,
메커니컬 타입(without vacuum) for 152.4mm (6") square substrates.
(Please specify substrate size in mm.)

E-CP6-S203.2-PP
with 6 centering pins,
메커니컬 타입(without vacuum) for 203.2mm (8") square substrates.
(Please specify substrate size in mm.)

E-CP6-S50.8-S76.2-PP
with 6 centering pins, per size
메커니컬 타입(without vacuum) for 50.8mm (2"), 76.2mm (3") square substrates.
(Please specify substrate size in mm.)

Rectangular Substrates
(Laboratory Glass, etc.)
Recessed 베큠척.
Customized sizes at request.

Recessed 베큠척 for rectangular substrates (e.g. Laboratory Glass):

(Please specify substrate size and thickness in mm.)

Low contact.
Non-vacuum Chuck with centering pins.
Customized sizes at request.

Low contact chuck

H-CP4-S150-S200-PP (picture)
H-CP4-S200-PP
H-CP4-S200-S300-PP
(Please specify substrate size in mm. Other sizes available at request.)

Thin, Fragile Substrates.
베큠척
Customized sizes at request.

베큠척 for film or other thin substrates